Analysis of Micro Machinable Piezoelectrically Driven One Dimensional Flexural Transducers
نویسنده
چکیده
shuctures with one or m r e piezoelechic layers included, v-ng along the plate, and is valid also for higher harmonics. It includes shear deformation, effects of residual shpss in the plate, and bending effects at height differences between plate elements. The analysis is compared both to expenmnls on a low frequency (140 kHz) PZT brass shucture, and to FEM analysis. FEM is also used to determine realistic edge bolmdiuy conditions for the shueture. The theory matches well with the FEM analysis for plate resome’s , and is in rea~onable agreement with experiments.
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